Abstract
The influence of the geometry on quantitative energy dispersive X-ray spectrometry (EDXS) analysis is determined for a ChemiSTEM system (Super-X) in combination with a low-background double-tilt specimen holder. For the first time a combination of experimental measurements with simulations is used to determine the positions of the individual detectors of a Super-X system. These positions allow us to calculate the detector's solid angles and estimate the amount of detector shadowing and its in fluence on quantitative EDXS analysis,
including absorption correction using the ζ-factor method. Both shadowing by the brass portions and theberyllium specimen carrier of the holder severely affect the quanti fication of low to medium atomic number elements. A multi detector system is discussed in terms of practical consequences of the described effects, and a quantitative evaluation of a Fayalit sample is demonstrated. Corrections and suggestions for minimizing systematic errors are discussed to improve quantitative methods for a multi-detector system.
including absorption correction using the ζ-factor method. Both shadowing by the brass portions and theberyllium specimen carrier of the holder severely affect the quanti fication of low to medium atomic number elements. A multi detector system is discussed in terms of practical consequences of the described effects, and a quantitative evaluation of a Fayalit sample is demonstrated. Corrections and suggestions for minimizing systematic errors are discussed to improve quantitative methods for a multi-detector system.
Original language | English |
---|---|
Pages (from-to) | 30-39 |
Journal | Ultramicroscopy |
Volume | 172 |
DOIs | |
Publication status | Published - 2017 |
ASJC Scopus subject areas
- Materials Science(all)
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)