Quantitative Chemical Phase Imaging by Means of Energy Filtering Transmission Electron Microscopy

Electron spectroscopic imaging (ESI) in the transmission electron microscope (TEM) is a powerful method to produce 2-dimensional elemental distribution maps. These maps show in a clear way the chemical situation of a small specimen region. In this work we used a Gatan Imaging Filter (GIF) attached to a 20OkV TEM to investigate a Ba-Nd-titanate ceramic. The three phases occuring in this material could be visualized using inner-shell ionization edges(Ba M₄₅, Nd M₄₅ and Ti L₂₃). We applied different image correlation techniques to the ESI elemental maps for direct visualization of the chemical phases. First we simply overlaid the elemental maps assigning each element one colour to form an RGB image. Secondly we used the technique of scatter diagrams to classify the different phases. Finally we quantified the elemental maps by dividing them and multiplying them by the appropriate inner-shell ionization cross-sections which gave atomic ratio images. By using these methods we could clearly identify and quantify the various phases in the Ba-Nd-titanate specimen.