Process Parameters for Particle Induced Deposition

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 3 Jul 2008
Event	3. FIB Workshop - Luzern, Switzerland Duration: 3 Jul 2008 → 4 Jul 2008

Fields of Expertise

@conference{22ff619077d34ae0b4e50c0e7c48511b,

title = "Process Parameters for Particle Induced Deposition",

author = "Harald Plank and Christian Gspan and Martina Dienstleder and Gerald Kothleitner and Ferdinand Hofer",

year = "2008",

month = jul,

day = "3",

language = "English",

note = "3. FIB Workshop ; Conference date: 03-07-2008 Through 04-07-2008",

}