Process Parameters for Particle Induced Deposition

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Original languageEnglish
Publication statusPublished - 3 Jul 2008
Event3. FIB Workshop - Luzern, Switzerland
Duration: 3 Jul 20084 Jul 2008

Conference

Conference3. FIB Workshop
CountrySwitzerland
CityLuzern
Period3/07/084/07/08

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • My Favorites
  • Application
  • Experimental

Cite this

Process Parameters for Particle Induced Deposition. / Plank, Harald; Gspan, Christian; Dienstleder, Martina; Kothleitner, Gerald; Hofer, Ferdinand.

2008. 3. FIB Workshop, Luzern, Switzerland.

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Plank, H, Gspan, C, Dienstleder, M, Kothleitner, G & Hofer, F 2008, 'Process Parameters for Particle Induced Deposition' 3. FIB Workshop, Luzern, Switzerland, 3/07/08 - 4/07/08, .
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title = "Process Parameters for Particle Induced Deposition",
author = "Harald Plank and Christian Gspan and Martina Dienstleder and Gerald Kothleitner and Ferdinand Hofer",
year = "2008",
month = "7",
day = "3",
language = "English",
note = "3. FIB Workshop ; Conference date: 03-07-2008 Through 04-07-2008",

}

TY - CONF

T1 - Process Parameters for Particle Induced Deposition

AU - Plank, Harald

AU - Gspan, Christian

AU - Dienstleder, Martina

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

PY - 2008/7/3

Y1 - 2008/7/3

M3 - (Old data) Lecture or Presentation

ER -