Process for Preparing Higher Hydridosilanes

Nicole Brausch (Inventor), Andre Ebbers (Inventor), Guido Stochniol (Inventor), Martin Trocha (Inventor), Yücel Önal (Inventor), Jörg Sauer (Inventor), Bernhard Stützel (Inventor), Dorit Wolf (Inventor), Harald Stüger (Inventor)

Research output: PatentResearch

Original languageGerman
Patent numberWO 2010/003729 A1
Publication statusPublished - 25 May 2009

Cite this

Brausch, N., Ebbers, A., Stochniol, G., Trocha, M., Önal, Y., Sauer, J., ... Stüger, H. (2009). Process for Preparing Higher Hydridosilanes. (Patent No. WO 2010/003729 A1).