Preparation of mixtures of Silicon oxynitride and silicon nitride

Ferdinand Hofer, Edwin Hengge

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)501-504
JournalAdvanced Materials
Volume4
Publication statusPublished - 1992

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

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