Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

Original languageEnglish
Publication statusPublished - 25 Jun 2013
EventD-A-CH FIB-Workshop - Unterpremstätten, Austria
Duration: 25 Jun 201326 Jun 2013

Conference

ConferenceD-A-CH FIB-Workshop
CountryAustria
CityUnterpremstätten
Period25/06/1326/06/13

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures. / Winkler, Robert; Plank, Harald.

2013. D-A-CH FIB-Workshop, Unterpremstätten, Austria.

Research output: Contribution to conference(Old data) Lecture or PresentationResearch

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title = "Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures",
author = "Robert Winkler and Harald Plank",
year = "2013",
month = "6",
day = "25",
language = "English",
note = "D-A-CH FIB-Workshop ; Conference date: 25-06-2013 Through 26-06-2013",

}

TY - CONF

T1 - Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

AU - Winkler, Robert

AU - Plank, Harald

PY - 2013/6/25

Y1 - 2013/6/25

M3 - (Old data) Lecture or Presentation

ER -