Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 25 Jun 2013
EventD-A-CH FIB-Workshop - Unterpremstätten, Austria
Duration: 25 Jun 201326 Jun 2013

Conference

ConferenceD-A-CH FIB-Workshop
CountryAustria
CityUnterpremstätten
Period25/06/1326/06/13

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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