Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

Robert Winkler, Aleksandra Szkudlarek, Ivo Utke, Harald Plank

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 2013
EventMNE - 39th International Conference on Micro and Nano Engineering - London
Duration: 16 Sep 201319 Sep 2013

Conference

ConferenceMNE - 39th International Conference on Micro and Nano Engineering
CityLondon
Period16/09/1319/09/13

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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