Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

Robert Winkler, Aleksandra Szkudlarek, Ivo Utke, Harald Plank

Research output: Contribution to conferencePosterResearch

Original languageEnglish
Publication statusPublished - 2013
EventMNE - 39th International Conference on Micro and Nano Engineering - London
Duration: 16 Sep 201319 Sep 2013

Conference

ConferenceMNE - 39th International Conference on Micro and Nano Engineering
CityLondon
Period16/09/1319/09/13

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Winkler, R., Szkudlarek, A., Utke, I., & Plank, H. (2013). Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures. Poster session presented at MNE - 39th International Conference on Micro and Nano Engineering, London, .

Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures. / Winkler, Robert; Szkudlarek, Aleksandra; Utke, Ivo; Plank, Harald.

2013. Poster session presented at MNE - 39th International Conference on Micro and Nano Engineering, London, .

Research output: Contribution to conferencePosterResearch

Winkler, R, Szkudlarek, A, Utke, I & Plank, H 2013, 'Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures' MNE - 39th International Conference on Micro and Nano Engineering, London, 16/09/13 - 19/09/13, .
Winkler R, Szkudlarek A, Utke I, Plank H. Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures. 2013. Poster session presented at MNE - 39th International Conference on Micro and Nano Engineering, London, .
Winkler, Robert ; Szkudlarek, Aleksandra ; Utke, Ivo ; Plank, Harald. / Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures. Poster session presented at MNE - 39th International Conference on Micro and Nano Engineering, London, .
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title = "Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures",
author = "Robert Winkler and Aleksandra Szkudlarek and Ivo Utke and Harald Plank",
year = "2013",
language = "English",
note = "MNE - 39th International Conference on Micro and Nano Engineering ; Conference date: 16-09-2013 Through 19-09-2013",

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TY - CONF

T1 - Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

AU - Winkler, Robert

AU - Szkudlarek, Aleksandra

AU - Utke, Ivo

AU - Plank, Harald

PY - 2013

Y1 - 2013

M3 - Poster

ER -