Poly(2-Oxazoline)-based Toolkit for High-Resolution-Photoresists with Tailor-made Adhesion

Martin Fimberger, Verena Schenk, Elisabeth Rossegger, Frank Wiesbrock

Research output: Contribution to conference(Old data) Lecture or Presentation

Projects

Finished

Surface chemistry and adhesive properties of designed photoresist polymers

Fimberger, M., Mühlbacher, I., Stelzer, F., Schenk, V. & Wiesbrock, F.

1/01/1031/12/13

Project: Research project