Plasma Prozessing Installation

Peter Ziger (Inventor), Helmut Jäger (Inventor), Christian Neureiter (Inventor)

Research output: PatentResearch

Original languageEnglish
Patent numberWO 2004/073009 A2
Publication statusPublished - 26 Aug 2004

Cite this

Ziger, P., Jäger, H., & Neureiter, C. (2004). Plasma Prozessing Installation. (Patent No. WO 2004/073009 A2).

Plasma Prozessing Installation. / Ziger, Peter (Inventor); Jäger, Helmut (Inventor); Neureiter, Christian (Inventor).

Patent No.: WO 2004/073009 A2.

Research output: PatentResearch

Ziger, P, Jäger, H & Neureiter, C 2004, Plasma Prozessing Installation, Patent No. WO 2004/073009 A2.
Ziger P, Jäger H, Neureiter C, inventors. Plasma Prozessing Installation. WO 2004/073009 A2. 2004 Aug 26.
Ziger, Peter (Inventor) ; Jäger, Helmut (Inventor) ; Neureiter, Christian (Inventor). / Plasma Prozessing Installation. Patent No.: WO 2004/073009 A2.
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title = "Plasma Prozessing Installation",
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AU - Ziger, Peter

AU - Jäger, Helmut

AU - Neureiter, Christian

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M3 - Patent

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