Plasma oxidation as a tool to design oxide films at low temperatures

Robert Schennach, D.G. Naugle, H McWhinney, David L Cocke

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 2 Oct 2000
Event	47th International Symposium of the American Vacuum Society - Boston, MA, United States Duration: 2 Oct 2000 → 6 Oct 2000

Conference	47th International Symposium of the American Vacuum Society
Country/Territory	United States
City	Boston, MA
Period	2/10/00 → 6/10/00

Treatment code (Nähere Zuordnung)

@conference{7ca6688b43f24e67886331401db80176,

title = "Plasma oxidation as a tool to design oxide films at low temperatures",

author = "Robert Schennach and D.G. Naugle and H McWhinney and Cocke, {David L}",

year = "2000",

month = oct,

day = "2",

language = "English",

note = "47th International Symposium of the American Vacuum Society ; Conference date: 02-10-2000 Through 06-10-2000",

}