Original language | English |
---|---|
Pages (from-to) | 1965-1970 |
Journal | Journal of Vacuum Science and Technology / A |
Volume | 19 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2001 |
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)
Robert Schennach, T Grady, D.G. Naugle, J R Parga, H McWhinney, David L Cocke
Research output: Contribution to journal › Article › peer-review
Original language | English |
---|---|
Pages (from-to) | 1965-1970 |
Journal | Journal of Vacuum Science and Technology / A |
Volume | 19 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2001 |