Investigation of the piezoelectric response of zinc oxide films prepared by plasma-enhanced atomic layer deposition (PE-ALD). The influence of the substrate as well as the substrate temperature during deposition is investigated. Films deposited on flexible polyethylene terephthalate (PET) generated higher piezoelectric current (> 1.8 nA) compared to films deposited on glass (> 0.3 nA) due to substrate bending. The generated piezoelectric current is enhanced at increased temperatures due to improved growth along the (002) crystallographic orientation.
|Publication status||Published - 28 Sep 2020|