The particle sensor device comprises a substrate (1), a photodetector (3), a dielectric (4) on or above the substrate (1), a source of electromagnetic radiation (5), and a through-substrate via (6) in the substrate (1). The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide (7) is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion (7.1) of the waveguide. A further portion (7.2) of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.
|Translated title of the contribution||PARTIKELDICHTE-SENSOR UNTER VERWENDUNG DER EVANESZENZ EINES WELLENLEITERS|
|IPC||G01N 15/ 00 A N|
|Publication status||Published - 19 Jun 2019|