Oxidation and diffusion processes during annealing of AlCrVN hard coatings

R. Franz, J. Neidhardt, C. Mitterer, Bernhard Schaffer, H. Hutter, R. Kaindl, B. Satory, R. Tessadri, M. Lechthaler, P. Polcik

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)302-308
JournalJournal of vacuum science & technology / A
DOIs
Publication statusPublished - 2008

Treatment code (Nähere Zuordnung)

  • Experimental

Cite this

Franz, R., Neidhardt, J., Mitterer, C., Schaffer, B., Hutter, H., Kaindl, R., ... Polcik, P. (2008). Oxidation and diffusion processes during annealing of AlCrVN hard coatings. Journal of vacuum science & technology / A, 302-308. https://doi.org/DOI: 10.1116/1.2841508

Oxidation and diffusion processes during annealing of AlCrVN hard coatings. / Franz, R.; Neidhardt, J.; Mitterer, C.; Schaffer, Bernhard; Hutter, H.; Kaindl, R.; Satory, B.; Tessadri, R.; Lechthaler, M.; Polcik, P.

In: Journal of vacuum science & technology / A, 2008, p. 302-308.

Research output: Contribution to journalArticleResearchpeer-review

Franz, R, Neidhardt, J, Mitterer, C, Schaffer, B, Hutter, H, Kaindl, R, Satory, B, Tessadri, R, Lechthaler, M & Polcik, P 2008, 'Oxidation and diffusion processes during annealing of AlCrVN hard coatings' Journal of vacuum science & technology / A, pp. 302-308. https://doi.org/DOI: 10.1116/1.2841508
Franz, R. ; Neidhardt, J. ; Mitterer, C. ; Schaffer, Bernhard ; Hutter, H. ; Kaindl, R. ; Satory, B. ; Tessadri, R. ; Lechthaler, M. ; Polcik, P. / Oxidation and diffusion processes during annealing of AlCrVN hard coatings. In: Journal of vacuum science & technology / A. 2008 ; pp. 302-308.
@article{684ee080b5b44854bde91856ab288f97,
title = "Oxidation and diffusion processes during annealing of AlCrVN hard coatings",
author = "R. Franz and J. Neidhardt and C. Mitterer and Bernhard Schaffer and H. Hutter and R. Kaindl and B. Satory and R. Tessadri and M. Lechthaler and P. Polcik",
year = "2008",
doi = "DOI: 10.1116/1.2841508",
language = "English",
pages = "302--308",
journal = "Journal of vacuum science & technology / A",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Oxidation and diffusion processes during annealing of AlCrVN hard coatings

AU - Franz, R.

AU - Neidhardt, J.

AU - Mitterer, C.

AU - Schaffer, Bernhard

AU - Hutter, H.

AU - Kaindl, R.

AU - Satory, B.

AU - Tessadri, R.

AU - Lechthaler, M.

AU - Polcik, P.

PY - 2008

Y1 - 2008

U2 - DOI: 10.1116/1.2841508

DO - DOI: 10.1116/1.2841508

M3 - Article

SP - 302

EP - 308

JO - Journal of vacuum science & technology / A

JF - Journal of vacuum science & technology / A

SN - 0734-2101

ER -