Ordered mesostructured silica films: Effect of pore surface on its sensing properties

P. Falcaro; J. Mio Bertolo; P. Innocenzi; Heinz Amenitsch; A. Bearzotti

doi:10.1007/s10971-004-5773-9

Ordered mesostructured silica films: Effect of pore surface on its sensing properties

P. Falcaro^*, J. Mio Bertolo, P. Innocenzi, Heinz Amenitsch, A. Bearzotti

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

An electrochemical resistive-type sensor device, with a mesoporous silica thin film as sensitive membrane, has been developed and characterised. The silica film has been obtained via evaporation-induced self-assembly (EISA) using a tri-block copolymer (Pluronic F-127) as templating agent. It has been deposited by dip-coating on a silicon substrate with metallic interdigitated electrodes. Fast, reversible and reproducible electrical responses to relative humidity changes have been observed for the sensor device. The conduction mechanism has been related to chemical properties, structural order and surface morphology of the porosity in the silica film, confirming the dependence on the film preparation method and overall the importance of calcination temperature.

Original language	English
Pages (from-to)	107-110
Number of pages	4
Journal	Journal of Sol-Gel Science and Technology
Volume	32
Issue number	1-3
DOIs	https://doi.org/10.1007/s10971-004-5773-9
Publication status	Published - Dec 2004
Externally published	Yes

Keywords

Grotthus conduction
Humidity sensor
Mesostructured materials
Self-assembling
Thin film

ASJC Scopus subject areas

Ceramics and Composites

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10.1007/s10971-004-5773-9

Cite this

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abstract = "An electrochemical resistive-type sensor device, with a mesoporous silica thin film as sensitive membrane, has been developed and characterised. The silica film has been obtained via evaporation-induced self-assembly (EISA) using a tri-block copolymer (Pluronic F-127) as templating agent. It has been deposited by dip-coating on a silicon substrate with metallic interdigitated electrodes. Fast, reversible and reproducible electrical responses to relative humidity changes have been observed for the sensor device. The conduction mechanism has been related to chemical properties, structural order and surface morphology of the porosity in the silica film, confirming the dependence on the film preparation method and overall the importance of calcination temperature.",

keywords = "Grotthus conduction, Humidity sensor, Mesostructured materials, Self-assembling, Thin film",

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AU - Falcaro, P.

AU - Bertolo, J. Mio

AU - Innocenzi, P.

AU - Amenitsch, Heinz

AU - Bearzotti, A.

PY - 2004/12

Y1 - 2004/12

N2 - An electrochemical resistive-type sensor device, with a mesoporous silica thin film as sensitive membrane, has been developed and characterised. The silica film has been obtained via evaporation-induced self-assembly (EISA) using a tri-block copolymer (Pluronic F-127) as templating agent. It has been deposited by dip-coating on a silicon substrate with metallic interdigitated electrodes. Fast, reversible and reproducible electrical responses to relative humidity changes have been observed for the sensor device. The conduction mechanism has been related to chemical properties, structural order and surface morphology of the porosity in the silica film, confirming the dependence on the film preparation method and overall the importance of calcination temperature.

AB - An electrochemical resistive-type sensor device, with a mesoporous silica thin film as sensitive membrane, has been developed and characterised. The silica film has been obtained via evaporation-induced self-assembly (EISA) using a tri-block copolymer (Pluronic F-127) as templating agent. It has been deposited by dip-coating on a silicon substrate with metallic interdigitated electrodes. Fast, reversible and reproducible electrical responses to relative humidity changes have been observed for the sensor device. The conduction mechanism has been related to chemical properties, structural order and surface morphology of the porosity in the silica film, confirming the dependence on the film preparation method and overall the importance of calcination temperature.

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KW - Humidity sensor

KW - Mesostructured materials

KW - Self-assembling

KW - Thin film

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Ordered mesostructured silica films: Effect of pore surface on its sensing properties

Abstract

Keywords

ASJC Scopus subject areas

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