Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates

Martina Dienstleder, Michael Rogers, Gerald Kothleitner, Ferdinand Hofer, B.O. Kolbesen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMicroscopy Conference - Dreiländertagung
Publisher.
Pages4-4
Publication statusPublished - 2005
EventMicroscopy Conference 2005 - 6.Dreiländertagung 2005: MC05 - Davos, Switzerland
Duration: 28 Aug 20052 Sep 2005

Conference

ConferenceMicroscopy Conference 2005 - 6.Dreiländertagung 2005
CountrySwitzerland
CityDavos
Period28/08/052/09/05

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