Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › peer-review

Original language	English
Title of host publication	Microscopy Conference - Dreiländertagung
Publisher	.
Pages	4-4
Publication status	Published - 2005
Event	Microscopy Conference 2005 - 6.Dreiländertagung 2005: MC05 - Davos, Switzerland Duration: 28 Aug 2005 → 2 Sept 2005

Conference	Microscopy Conference 2005 - 6.Dreiländertagung 2005
Country/Territory	Switzerland
City	Davos
Period	28/08/05 → 2/09/05

Cite this

@inproceedings{110ffa88a9224bc0ab9b7ff7a52d7f1b,

title = "Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates",

author = "Martina Dienstleder and Michael Rogers and Gerald Kothleitner and Ferdinand Hofer and B.O. Kolbesen",

year = "2005",

language = "English",

pages = "4--4",

booktitle = "Microscopy Conference - Dreil{\"a}ndertagung",

publisher = ".",

note = "Microscopy Conference 2005 - 6.Dreil{\"a}ndertagung 2005 : MC05 ; Conference date: 28-08-2005 Through 02-09-2005",

}

TY - GEN

T1 - Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates

AU - Dienstleder, Martina

AU - Rogers, Michael

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

AU - Kolbesen, B.O.

PY - 2005

Y1 - 2005

M3 - Conference paper

SP - 4

EP - 4

BT - Microscopy Conference - Dreiländertagung

PB - .

T2 - Microscopy Conference 2005 - 6.Dreiländertagung 2005

Y2 - 28 August 2005 through 2 September 2005

ER -