Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates

Martina Dienstleder, Michael Rogers, Gerald Kothleitner, Ferdinand Hofer, Bernd Kolbesen

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 2005
EventMicroscopy Conference 2005 - 6.Dreiländertagung 2005 - Davos, Switzerland
Duration: 28 Aug 20052 Sep 2005

Conference

ConferenceMicroscopy Conference 2005 - 6.Dreiländertagung 2005
CountrySwitzerland
CityDavos
Period28/08/052/09/05

Cite this

Dienstleder, M., Rogers, M., Kothleitner, G., Hofer, F., & Kolbesen, B. (2005). Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates. Poster session presented at Microscopy Conference 2005 - 6.Dreiländertagung 2005, Davos, Switzerland.