Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

Harald Plank; Gerald Kothleitner; Ferdinand Hofer; Stephan Georg Wolfgang Michelitsch; Christian Gspan; Andreas Hohenau; Joachim Krenn

Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

Harald Plank, Gerald Kothleitner, Ferdinand Hofer, Stephan Georg Wolfgang Michelitsch, Christian Gspan, Andreas Hohenau, Joachim Krenn

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	051801-1-051801-7
Journal	Journal of Vacuum Science and Technology / A
Volume	29
Issue number	5
Publication status	Published - 2011

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Functional Nanofabrication
Dohr, J., Plank, H., Rosker, S., Winkler, R., Stermitz, M., Reisecker, V., Michelitsch, S. G. W., Brugger-Hatzl, M., Schmied, R., Eicher, B., Orthacker, A., Arnold, G., Sattelkow, J., Kolb, F., Ganner, T., Haselmann, U., Seewald, L. & Aschl, T.
1/01/09 → …
Project: Research project

Cite this

@article{d05ee49619ac45b9b7a0eb0ef91e40ff,

title = "Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits",

author = "Harald Plank and Gerald Kothleitner and Ferdinand Hofer and Michelitsch, {Stephan Georg Wolfgang} and Christian Gspan and Andreas Hohenau and Joachim Krenn",

note = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

year = "2011",

language = "English",

volume = "29",

pages = "051801--1--051801--7",

journal = "Journal of Vacuum Science and Technology / A",

issn = "0734-2101",

publisher = "American Vacuum Society (AVS)",

number = "5",

}

TY - JOUR

T1 - Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

AU - Plank, Harald

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

AU - Michelitsch, Stephan Georg Wolfgang

AU - Gspan, Christian

AU - Hohenau, Andreas

AU - Krenn, Joachim

N1 - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

PY - 2011

Y1 - 2011

M3 - Article

VL - 29

SP - 051801-1-051801-7

JO - Journal of Vacuum Science and Technology / A

JF - Journal of Vacuum Science and Technology / A

SN - 0734-2101

IS - 5

ER -

Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

Fields of Expertise

Treatment code (Nähere Zuordnung)

Projects

Functional Nanofabrication

Cite this