Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

Harald Plank; Gerald Kothleitner; Ferdinand Hofer; Stephan Georg Wolfgang Michelitsch; Christian Gspan; Andreas Hohenau; Joachim Krenn

Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

Harald Plank, Gerald Kothleitner, Ferdinand Hofer, Stephan Georg Wolfgang Michelitsch, Christian Gspan, Andreas Hohenau, Joachim Krenn

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	051801-1-051801-7
Journal	Journal of Vacuum Science and Technology / A
Volume	29
Issue number	5
Publication status	Published - 2011

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Cite this

Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits. / Plank, Harald ; Kothleitner, Gerald ; Hofer, Ferdinand; Michelitsch, Stephan Georg Wolfgang; Gspan, Christian; Hohenau, Andreas; Krenn, Joachim.

In: Journal of Vacuum Science and Technology / A, Vol. 29, No. 5, 2011, p. 051801-1-051801-7.

Research output: Contribution to journal › Article › peer-review

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title = "Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits",

author = "Harald Plank and Gerald Kothleitner and Ferdinand Hofer and Michelitsch, {Stephan Georg Wolfgang} and Christian Gspan and Andreas Hohenau and Joachim Krenn",

note = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

year = "2011",

language = "English",

volume = "29",

pages = "051801--1--051801--7",

journal = "Journal of Vacuum Science and Technology / A",

issn = "0734-2101",

publisher = "American Vacuum Society (AVS)",

number = "5",

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TY - JOUR

T1 - Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

AU - Plank, Harald

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

AU - Michelitsch, Stephan Georg Wolfgang

AU - Gspan, Christian

AU - Hohenau, Andreas

AU - Krenn, Joachim

N1 - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

PY - 2011

Y1 - 2011

M3 - Article

VL - 29

SP - 051801-1-051801-7

JO - Journal of Vacuum Science and Technology / A

JF - Journal of Vacuum Science and Technology / A

SN - 0734-2101

IS - 5

ER -