Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

Harald Plank, Gerald Kothleitner, Ferdinand Hofer, Stephan Georg Wolfgang Michelitsch, Christian Gspan, Andreas Hohenau, Joachim Krenn

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)051801-1-051801-7
JournalJournal of Vacuum Science and Technology / A
Issue number5
Publication statusPublished - 2011

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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