OPTISCHE ANORDNUNG FÜR ELLIPSOMETRIE

Translated title of the contribution: OPTICAL ARRANGEMENT FOR ELLIPSOMETRY

Eduard Gilli, (Inventor), Robert Schennach, (Inventor), Martin Kornschober, (Inventor)

Research output: Patent

Abstract

In an optical arrangement (1) for measuring spectroscopic properties of a sample located at a sample position (2), a light bundle is directed at the sample position at an adjustable angle of incidence (f) by means of a first rotating mirror (7) and a first arc-shaped main mirror (8), and the light reflected from the sample position is fed to a measurement by means of a second arc-shaped main mirror (18) and a second rotating mirror (17). The first and second main mirrors (8, 18) have a mirror surface that corresponds to at least one strip-shaped section of a surface of revolution about the main axis (4) and that casts light coming from the first rotating mirror (7) in the different adjustable rotational positions thereof onto the sample position, wherein the rotating mirrors (7, 17) are arranged opposite each other on the main axis (4) and are both tilted from their rotational axes by an angle.

Original languageGerman
Patent numberWO2011022745
IPCG01N 21/ 21 A I
Priority date26/08/09
Publication statusPublished - 3 Mar 2011

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