Observer-based temperature control of an LED heated silicon wafer

Martin Kleindienst, Markus Reichhartinger, Martin Horn, Felix Staudegger

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)96-108
JournalJournal of Process Control
Volume70
DOIs
Publication statusPublished - 2018

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