Observer-based temperature control of an LED heated silicon wafer

Martin Kleindienst, Markus Reichhartinger, Martin Horn, Felix Staudegger

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)96-108
JournalJournal of Process Control
Volume70
DOIs
Publication statusPublished - 2018

Cite this

Observer-based temperature control of an LED heated silicon wafer. / Kleindienst, Martin; Reichhartinger, Markus; Horn, Martin; Staudegger, Felix.

In: Journal of Process Control, Vol. 70, 2018, p. 96-108.

Research output: Contribution to journalArticleResearchpeer-review

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title = "Observer-based temperature control of an LED heated silicon wafer",
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journal = "Journal of Process Control",
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AU - Reichhartinger, Markus

AU - Horn, Martin

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