Novel Investigation Possibilities On FEBID Deposits By Combining Dual-Beam Capabilities With In-Situ High-Speed AFM

Robert Winkler, C. Yang, Stephan Georg Wolfgang Michelitsch, Harald Plank, C.H. Schwalb, M. Winhold, A. Deutschinger, G.E. Fantner, E.J. Fantner

Research output: Contribution to conferencePoster

Original languageGerman
Publication statusPublished - 2016
EventFEBIP - Wien, Austria
Duration: 4 Jul 20168 Jul 2016

Conference

ConferenceFEBIP
CountryAustria
CityWien
Period4/07/168/07/16

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Winkler, R., Yang, C., Michelitsch, S. G. W., Plank, H., Schwalb, C. H., Winhold, M., ... Fantner, E. J. (2016). Novel Investigation Possibilities On FEBID Deposits By Combining Dual-Beam Capabilities With In-Situ High-Speed AFM. Poster session presented at FEBIP, Wien, Austria.