Novel Investigation Possibilities On FEBID Deposits By Combining Dual-Beam Capabilities With In-Situ High-Speed AFM

Robert Winkler, C. Yang, Stephan Georg Wolfgang Michelitsch, Harald Plank, C.H. Schwalb, M. Winhold, A. Deutschinger, G.E. Fantner, E.J. Fantner

Research output: Contribution to conferencePoster

Original languageGerman
Publication statusPublished - 2016
EventFEBIP - Wien, Austria
Duration: 4 Jul 20168 Jul 2016

Conference

ConferenceFEBIP
CountryAustria
CityWien
Period4/07/168/07/16

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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