Multiple proton implantations into silicon: A combined EBIC and SRP study

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes Laven, Hans-Joachim Schulze, Peter Hadley

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)311-316
JournalSolid state phenomena
Volume205-206
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Cite this

Kirnstötter, S., Faccinelli, M., Jelinek, M., Schustereder, W., Laven, J., Schulze, H-J., & Hadley, P. (2014). Multiple proton implantations into silicon: A combined EBIC and SRP study. Solid state phenomena, 205-206, 311-316. https://doi.org/10.4028/www.scientific.net/SSP.205-206.311

Multiple proton implantations into silicon: A combined EBIC and SRP study. / Kirnstötter, Stefan; Faccinelli, Martin; Jelinek, Moriz; Schustereder, Werner; Laven, Johannes; Schulze, Hans-Joachim; Hadley, Peter.

In: Solid state phenomena, Vol. 205-206, 2014, p. 311-316.

Research output: Contribution to journalArticleResearchpeer-review

Kirnstötter, S, Faccinelli, M, Jelinek, M, Schustereder, W, Laven, J, Schulze, H-J & Hadley, P 2014, 'Multiple proton implantations into silicon: A combined EBIC and SRP study' Solid state phenomena, vol. 205-206, pp. 311-316. https://doi.org/10.4028/www.scientific.net/SSP.205-206.311
Kirnstötter S, Faccinelli M, Jelinek M, Schustereder W, Laven J, Schulze H-J et al. Multiple proton implantations into silicon: A combined EBIC and SRP study. Solid state phenomena. 2014;205-206:311-316. https://doi.org/10.4028/www.scientific.net/SSP.205-206.311
Kirnstötter, Stefan ; Faccinelli, Martin ; Jelinek, Moriz ; Schustereder, Werner ; Laven, Johannes ; Schulze, Hans-Joachim ; Hadley, Peter. / Multiple proton implantations into silicon: A combined EBIC and SRP study. In: Solid state phenomena. 2014 ; Vol. 205-206. pp. 311-316.
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AU - Schulze, Hans-Joachim

AU - Hadley, Peter

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