Multiple proton implantations into silicon: A combined EBIC and SRP study

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes Laven, Hans-Joachim Schulze, Peter Hadley

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)311-316
JournalSolid state phenomena
Volume205-206
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

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