Multiple proton implantations into silicon: A combined EBIC and SRP study

Stefan Kirnstötter, Martin Faccinelli, Moriz Jelinek, Werner Schustereder, Johannes Laven, Hans-Joachim Schulze, Peter Hadley

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)311-316
JournalSolid state phenomena
Volume205-206
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Cite this

Kirnstötter, S., Faccinelli, M., Jelinek, M., Schustereder, W., Laven, J., Schulze, H-J., & Hadley, P. (2014). Multiple proton implantations into silicon: A combined EBIC and SRP study. Solid state phenomena, 205-206, 311-316. https://doi.org/10.4028/www.scientific.net/SSP.205-206.311