Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications

Lado Filipovic, Siegfried Selberherr, Giorgio Cataldo Mutinati, Elise Brunet, Stephan Steinhauer, Anton Köck, Jordi Teva, Jochen Kraft, Jörg Siegert, Franz Schrank, Christian Gspan, Werner Grogger

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)269-277
JournalIEEE transactions on semiconductor manufacturing
Volume27
Issue number2
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this