Minimization of unwanted proximity deposition during electron beam induced Pt deposition

Harald Plank; Roland Schmied; Florian Kolb; Christian Gspan; Thomas Haber; Daryl A. Smith; Philip D. Rack; Jason D. Fowlkes; Gerald Kothleitner; Ferdinand Hofer

Minimization of unwanted proximity deposition during electron beam induced Pt deposition

Harald Plank, Roland Schmied, Florian Kolb, Christian Gspan, Thomas Haber, Daryl A. Smith, Philip D. Rack, Jason D. Fowlkes, Gerald Kothleitner, Ferdinand Hofer

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 18 Jun 2012
Event	FEBIP 2012 - Zaragoza, Spain Duration: 18 Jun 2012 → 23 Jun 2012

Conference

Conference	FEBIP 2012
Country/Territory	Spain
City	Zaragoza
Period	18/06/12 → 23/06/12

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Cite this

@conference{8ff4eaa989e34cffa1d6cd1c2c4d9702,

title = "Minimization of unwanted proximity deposition during electron beam induced Pt deposition",

author = "Harald Plank and Roland Schmied and Florian Kolb and Christian Gspan and Thomas Haber and Smith, {Daryl A.} and Rack, {Philip D.} and Fowlkes, {Jason D.} and Gerald Kothleitner and Ferdinand Hofer",

year = "2012",

month = jun,

day = "18",

language = "English",

note = "FEBIP 2012 ; Conference date: 18-06-2012 Through 23-06-2012",

}

TY - CONF

T1 - Minimization of unwanted proximity deposition during electron beam induced Pt deposition

AU - Plank, Harald

AU - Schmied, Roland

AU - Kolb, Florian

AU - Gspan, Christian

AU - Haber, Thomas

AU - Smith, Daryl A.

AU - Rack, Philip D.

AU - Fowlkes, Jason D.

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

PY - 2012/6/18

Y1 - 2012/6/18

M3 - (Old data) Lecture or Presentation

T2 - FEBIP 2012

Y2 - 18 June 2012 through 23 June 2012

ER -