Microfabrication of the combined AFM-SECM Sensors utilizing Focused Ion Beam and Isotropic Inductively Coupled Plasma-Reactive Ion Etching

Amra Avdic, Alois Lugstein, Ming Wu, Bernhard Gollas, Ilya Pobelov, Thomas Wandlowski, Emmerich Bertagnolli

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 29 Nov 2010
Event	MRS Fall Meeting 2010 - Boston, United States Duration: 29 Nov 2010 → 2 Dec 2010

Fields of Expertise

@conference{74380e68738e4de7877dfbccd563aa1b,

title = "Microfabrication of the combined AFM-SECM Sensors utilizing Focused Ion Beam and Isotropic Inductively Coupled Plasma-Reactive Ion Etching",

author = "Amra Avdic and Alois Lugstein and Ming Wu and Bernhard Gollas and Ilya Pobelov and Thomas Wandlowski and Emmerich Bertagnolli",

year = "2010",

month = nov,

day = "29",

language = "English",

note = "MRS Fall Meeting 2010 ; Conference date: 29-11-2010 Through 02-12-2010",

}

TY - CONF

T1 - Microfabrication of the combined AFM-SECM Sensors utilizing Focused Ion Beam and Isotropic Inductively Coupled Plasma-Reactive Ion Etching

AU - Avdic, Amra

AU - Lugstein, Alois

AU - Wu, Ming

AU - Gollas, Bernhard

AU - Pobelov, Ilya

AU - Wandlowski, Thomas

AU - Bertagnolli, Emmerich

PY - 2010/11/29

Y1 - 2010/11/29

M3 - (Old data) Lecture or Presentation

T2 - MRS Fall Meeting 2010

Y2 - 29 November 2010 through 2 December 2010

ER -