Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition

Johannes Fröch, Jürgen Sattelkow, Harald Plank

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication
Chapter7A3
Number of pages2
Publication statusPublished - 30 May 2017

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application

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