Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition

Johannes Fröch, Jürgen Sattelkow, Harald Plank

Research output: Chapter in Book/Report/Conference proceeding › Conference paper

Original language	English
Title of host publication	The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication
Chapter	7A3
Number of pages	2
Publication status	Published - 30 May 2017

ASJC Scopus subject areas

@inproceedings{4e43397a118141c397c7a12479192e01,

title = "Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition",

author = "Johannes Fr{\"o}ch and J{\"u}rgen Sattelkow and Harald Plank",

year = "2017",

month = may,

day = "30",

language = "English",

booktitle = "The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication",

}