Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearch

Original languageEnglish
Title of host publicationThe 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication
Chapter7A3
Number of pages2
Publication statusPublished - 30 May 2017

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application

Cite this

Fröch, J., Sattelkow, J., & Plank, H. (2017). Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition. In The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication

Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition. / Fröch, Johannes; Sattelkow, Jürgen; Plank, Harald.

The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication. 2017.

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearch

Fröch, J, Sattelkow, J & Plank, H 2017, Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition. in The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication.
Fröch J, Sattelkow J, Plank H. Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition. In The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication. 2017
Fröch, Johannes ; Sattelkow, Jürgen ; Plank, Harald. / Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition. The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication. 2017.
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AU - Fröch, Johannes

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AU - Plank, Harald

PY - 2017/5/30

Y1 - 2017/5/30

M3 - Conference contribution

BT - The 61 st International Conference on Electron, Ion, and Photon Beam Technology, and Nanofabrication

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