Materials synthesis and processing by deep X-ray lithography

Benedetta Marmiroli, Paolo Falcaro, Luca Malfatti, Marco Faustini, Cara M. Doherty, David Grosso, Plinio Innocenzi, Heinz Amenitsch

Research output: Contribution to conferencePosterResearch

Original languageEnglish
Publication statusPublished - 2013
EventHARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology) - Berlin
Duration: 21 Apr 201324 Apr 2013

Conference

ConferenceHARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology)
CityBerlin
Period21/04/1324/04/13

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Marmiroli, B., Falcaro, P., Malfatti, L., Faustini, M., Doherty, C. M., Grosso, D., ... Amenitsch, H. (2013). Materials synthesis and processing by deep X-ray lithography. Poster session presented at HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology), Berlin, .