Lithography of porous materials for devices fabrication

Paolo Falcaro, Plinio Innocenzi, Anita J. Hill, Cara Doherty

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Abstract

Advanced porous materials open up new frontiers for sensing, drug delivery and host matrices for biomedical applications because selective/active release/sequestration of precise molecules is expected. Different types of materials are currently being investigated and paths which move between material optimization and patterning processes are clearly observed for mesoporous materials. Here we present our recent progress on lithographic methodologies to achieve such spatial control for ceramic mesoporous coatings with a particular focus on metal organic frameworks for emerging sensing technology.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume8204
DOIs
Publication statusPublished - 2011
Externally publishedYes
EventSmart Nano-Micro Materials and Devices - Hawthorn, VIC, Australia
Duration: 5 Dec 20117 Dec 2011

Conference

ConferenceSmart Nano-Micro Materials and Devices
CountryAustralia
CityHawthorn, VIC
Period5/12/117/12/11

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Keywords

  • Device
  • Lithography
  • Mesoporous
  • Metal organic frameworks
  • MOF
  • Patterning

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Falcaro, P., Innocenzi, P., Hill, A. J., & Doherty, C. (2011). Lithography of porous materials for devices fabrication. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 8204). [82041X] https://doi.org/10.1117/12.904854