Lithium Barrier Materials for On-Chip Si-Based Microbatteries

Rafael Janski; Michael Fugger; Magdalena Forster; Michael Sorger; Andreas Dunst; Ilie Hanzu; Michael Sternad; Martin Wilkening

doi:10.1007/s10854-017-7325-4

Lithium Barrier Materials for On-Chip Si-Based Microbatteries

Rafael Janski, Michael Fugger, Magdalena Forster, Michael Sorger, Andreas Dunst, Ilie Hanzu, Michael Sternad, Martin Wilkening

Institute for Chemistry and Technology of Materials (6380)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	14605–14614
Journal	Journal of Materials Science / Materials in Electronics
Volume	28
Issue number	19
DOIs	https://doi.org/10.1007/s10854-017-7325-4
Publication status	Published - 2017

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10.1007/s10854-017-7325-4

Cite this

Lithium Barrier Materials for On-Chip Si-Based Microbatteries. / Janski, Rafael; Fugger, Michael; Forster, Magdalena; Sorger, Michael; Dunst, Andreas; Hanzu, Ilie; Sternad, Michael; Wilkening, Martin.

In: Journal of Materials Science / Materials in Electronics, Vol. 28, No. 19, 2017, p. 14605–14614.

Research output: Contribution to journal › Article › peer-review

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AU - Janski, Rafael

AU - Fugger, Michael

AU - Forster, Magdalena

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AU - Dunst, Andreas

AU - Hanzu, Ilie

AU - Sternad, Michael

AU - Wilkening, Martin

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JO - Journal of Materials Science / Materials in Electronics

JF - Journal of Materials Science / Materials in Electronics

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