Lithium Barrier Materials for On-Chip Si-Based Microbatteries

Rafael Janski, Michael Fugger, Magdalena Forster, Michael Sorger, Andreas Dunst, Ilie Hanzu, Michael Sternad, Martin Wilkening

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)14605–14614
JournalJournal of Materials Science / Materials in Electronics
Volume28
Issue number19
DOIs
Publication statusPublished - 2017

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