Lateral gradients in precursor working regimes and its consequences on the surface morphology of focused electron beam induced deposits

Robert Winkler, Jason D. Fowlkes, Aleksandra Szkudlarek, Ivo Utke, Philip D. Rack, Harald Plank

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 21 Jul 2014
EventFEBIP 2014 - Frankfurt, Germany
Duration: 21 Jul 201425 Jul 2014

Conference

ConferenceFEBIP 2014
CountryGermany
CityFrankfurt
Period21/07/1425/07/14

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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