Investigation of the influence of unwanted micro lenses caused by semiconductor processing excursions on optical behavior of CMOS photodiodes

Andrea Kraxner, Jong Mun Park , Rainer Minixhofer

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Original languageEnglish
Title of host publication Physics and Simulation of Optoelectronic Devices XXIII
Volume23
DOIs
Publication statusPublished - 2015
Externally publishedYes

Publication series

NameSPIE Proc.
Volume9357

Cite this

Kraxner, A., Park , J. M., & Minixhofer, R. (2015). Investigation of the influence of unwanted micro lenses caused by semiconductor processing excursions on optical behavior of CMOS photodiodes. In Physics and Simulation of Optoelectronic Devices XXIII (Vol. 23). (SPIE Proc.; Vol. 9357). https://doi.org/10.1117/12.2079022

Investigation of the influence of unwanted micro lenses caused by semiconductor processing excursions on optical behavior of CMOS photodiodes. / Kraxner, Andrea; Park , Jong Mun; Minixhofer, Rainer.

Physics and Simulation of Optoelectronic Devices XXIII. Vol. 23 2015. (SPIE Proc.; Vol. 9357).

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Kraxner, A, Park , JM & Minixhofer, R 2015, Investigation of the influence of unwanted micro lenses caused by semiconductor processing excursions on optical behavior of CMOS photodiodes. in Physics and Simulation of Optoelectronic Devices XXIII. vol. 23, SPIE Proc., vol. 9357. https://doi.org/10.1117/12.2079022
Kraxner A, Park JM, Minixhofer R. Investigation of the influence of unwanted micro lenses caused by semiconductor processing excursions on optical behavior of CMOS photodiodes. In Physics and Simulation of Optoelectronic Devices XXIII. Vol. 23. 2015. (SPIE Proc.). https://doi.org/10.1117/12.2079022
Kraxner, Andrea ; Park , Jong Mun ; Minixhofer, Rainer. / Investigation of the influence of unwanted micro lenses caused by semiconductor processing excursions on optical behavior of CMOS photodiodes. Physics and Simulation of Optoelectronic Devices XXIII. Vol. 23 2015. (SPIE Proc.).
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