Investigation of Leakage Rates and Flow in a Wafer Washing Unit

Thomas Forgber, Federico Municchi, Stefan Radl

Research output: Book/ReportOther reportResearch

Original languageEnglish
Publisher.
Publication statusPublished - 2016

Fields of Expertise

  • Mobility & Production

Treatment code (Nähere Zuordnung)

  • Application

Cite this

Investigation of Leakage Rates and Flow in a Wafer Washing Unit. / Forgber, Thomas; Municchi, Federico; Radl, Stefan.

., 2016.

Research output: Book/ReportOther reportResearch

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title = "Investigation of Leakage Rates and Flow in a Wafer Washing Unit",
author = "Thomas Forgber and Federico Municchi and Stefan Radl",
year = "2016",
language = "English",
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TY - BOOK

T1 - Investigation of Leakage Rates and Flow in a Wafer Washing Unit

AU - Forgber, Thomas

AU - Municchi, Federico

AU - Radl, Stefan

PY - 2016

Y1 - 2016

M3 - Other report

BT - Investigation of Leakage Rates and Flow in a Wafer Washing Unit

PB - .

ER -