Investigation of Epitaxial Process Induced Stacking Faults on Silicon Wafers by Surface Analytical Methods

Ernst Lankmayr, Brigitte Patsch, T. Ehmann

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)H540-H544
JournalJournal of the Electrochemical Society
Volume155 (7)
DOIs
Publication statusPublished - 2008

Treatment code (Nähere Zuordnung)

  • Experimental

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