Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC

Stefan Kirnstötter, Martin Mario Faccinelli, Peter Hadley, Reinhart Job, Werner Schustereder, Johannes Laven, Hans-Joachim Schulze

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)145-160
JournalECS Transactions
Volume50
Issue number5
DOIs
Publication statusPublished - 2013

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Kirnstötter, S., Faccinelli, M. M., Hadley, P., Job, R., Schustereder, W., Laven, J., & Schulze, H-J. (2013). Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC. ECS Transactions, 50(5), 145-160. https://doi.org/10.1149/05005.0115ecst