Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC

Stefan Kirnstötter, Martin Mario Faccinelli, Peter Hadley, Reinhart Job, Werner Schustereder, Johannes Laven, Hans-Joachim Schulze

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)145-160
JournalECS Transactions
Volume50
Issue number5
DOIs
Publication statusPublished - 2013

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Kirnstötter, S., Faccinelli, M. M., Hadley, P., Job, R., Schustereder, W., Laven, J., & Schulze, H-J. (2013). Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC. ECS Transactions, 50(5), 145-160. https://doi.org/10.1149/05005.0115ecst

Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC. / Kirnstötter, Stefan; Faccinelli, Martin Mario; Hadley, Peter; Job, Reinhart; Schustereder, Werner; Laven, Johannes; Schulze, Hans-Joachim.

In: ECS Transactions, Vol. 50, No. 5, 2013, p. 145-160.

Research output: Contribution to journalArticleResearch

Kirnstötter, S, Faccinelli, MM, Hadley, P, Job, R, Schustereder, W, Laven, J & Schulze, H-J 2013, 'Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC' ECS Transactions, vol. 50, no. 5, pp. 145-160. https://doi.org/10.1149/05005.0115ecst
Kirnstötter, Stefan ; Faccinelli, Martin Mario ; Hadley, Peter ; Job, Reinhart ; Schustereder, Werner ; Laven, Johannes ; Schulze, Hans-Joachim. / Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC. In: ECS Transactions. 2013 ; Vol. 50, No. 5. pp. 145-160.
@article{8d872cec096943adb616b3630ccbab60,
title = "Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC",
author = "Stefan Kirnst{\"o}tter and Faccinelli, {Martin Mario} and Peter Hadley and Reinhart Job and Werner Schustereder and Johannes Laven and Hans-Joachim Schulze",
year = "2013",
doi = "10.1149/05005.0115ecst",
language = "English",
volume = "50",
pages = "145--160",
journal = "ECS Transactions",
issn = "1938-5862",
publisher = "Electrochemical Society, Inc.",
number = "5",

}

TY - JOUR

T1 - Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC

AU - Kirnstötter, Stefan

AU - Faccinelli, Martin Mario

AU - Hadley, Peter

AU - Job, Reinhart

AU - Schustereder, Werner

AU - Laven, Johannes

AU - Schulze, Hans-Joachim

PY - 2013

Y1 - 2013

U2 - 10.1149/05005.0115ecst

DO - 10.1149/05005.0115ecst

M3 - Article

VL - 50

SP - 145

EP - 160

JO - ECS Transactions

JF - ECS Transactions

SN - 1938-5862

IS - 5

ER -