Inverted fireball deposition of carbon films with extremely low surface roughness

J. Gruenwald; G. Eichenhofer; G. Filipič; Federl; W. Feuchtenberger; K. Panos; G. Hernández Rodríguez; A. M. Coclite

doi:10.1007/s42823-022-00424-9

Inverted fireball deposition of carbon films with extremely low surface roughness

J. Gruenwald^*, G. Eichenhofer, G. Filipič, Federl, W. Feuchtenberger, K. Panos, G. Hernández Rodríguez, A. M. Coclite

^*Corresponding author for this work

Institute of Solid State Physics (5130)

Research output: Contribution to journal › Article › peer-review

Abstract

The surface of carbon films deposited with inverted plasma fireballs is analysed in this paper. Measurements were conducted with Raman spectroscopy, atomic force microscopy and nanoindentation. The latter was used to obtain Young’s modulus as well as Martens and Vickers hardness. The roughness of the film was measured by atomic force microscopy and its thickness was measured. It was shown with Raman spectroscopy that the films are homogeneous in terms of atomic composition and layer thickness over an area of about 125 × 125 mm. Furthermore, it was demonstrated that inverted plasma fireballs are a viable tool for obtaining homogeneous, large area carbon films with rapid growth and very little energy consumption. The obtained films show very low roughness.

Original language	English
Journal	Carbon Letters
DOIs	https://doi.org/10.1007/s42823-022-00424-9
Publication status	E-pub ahead of print - 2022

Keywords

Carbon
Deposition
Inverted fireballs
PECVD

ASJC Scopus subject areas

Ceramics and Composites
Renewable Energy, Sustainability and the Environment
Energy Engineering and Power Technology
Process Chemistry and Technology
Organic Chemistry
Inorganic Chemistry
Materials Chemistry

Fields of Expertise

Advanced Materials Science

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1007/s42823-022-00424-9

Cite this

@article{f7c765de70954b9f8009459ad1990027,

title = "Inverted fireball deposition of carbon films with extremely low surface roughness",

abstract = "The surface of carbon films deposited with inverted plasma fireballs is analysed in this paper. Measurements were conducted with Raman spectroscopy, atomic force microscopy and nanoindentation. The latter was used to obtain Young{\textquoteright}s modulus as well as Martens and Vickers hardness. The roughness of the film was measured by atomic force microscopy and its thickness was measured. It was shown with Raman spectroscopy that the films are homogeneous in terms of atomic composition and layer thickness over an area of about 125 × 125 mm. Furthermore, it was demonstrated that inverted plasma fireballs are a viable tool for obtaining homogeneous, large area carbon films with rapid growth and very little energy consumption. The obtained films show very low roughness.",

keywords = "Carbon, Deposition, Inverted fireballs, PECVD",

author = "J. Gruenwald and G. Eichenhofer and G. Filipi{\v c} and Federl and W. Feuchtenberger and K. Panos and Rodr{\'i}guez, {G. Hern{\'a}ndez} and Coclite, {A. M.}",

note = "Publisher Copyright: {\textcopyright} 2022, The Author(s), under exclusive licence to Korean Carbon Society.",

year = "2022",

doi = "10.1007/s42823-022-00424-9",

language = "English",

journal = "Carbon Letters",

issn = "1976-4251",

publisher = "Springer",

}

TY - JOUR

T1 - Inverted fireball deposition of carbon films with extremely low surface roughness

AU - Gruenwald, J.

AU - Eichenhofer, G.

AU - Filipič, G.

AU - Federl,

AU - Feuchtenberger, W.

AU - Panos, K.

AU - Rodríguez, G. Hernández

AU - Coclite, A. M.

PY - 2022

Y1 - 2022

N2 - The surface of carbon films deposited with inverted plasma fireballs is analysed in this paper. Measurements were conducted with Raman spectroscopy, atomic force microscopy and nanoindentation. The latter was used to obtain Young’s modulus as well as Martens and Vickers hardness. The roughness of the film was measured by atomic force microscopy and its thickness was measured. It was shown with Raman spectroscopy that the films are homogeneous in terms of atomic composition and layer thickness over an area of about 125 × 125 mm. Furthermore, it was demonstrated that inverted plasma fireballs are a viable tool for obtaining homogeneous, large area carbon films with rapid growth and very little energy consumption. The obtained films show very low roughness.

AB - The surface of carbon films deposited with inverted plasma fireballs is analysed in this paper. Measurements were conducted with Raman spectroscopy, atomic force microscopy and nanoindentation. The latter was used to obtain Young’s modulus as well as Martens and Vickers hardness. The roughness of the film was measured by atomic force microscopy and its thickness was measured. It was shown with Raman spectroscopy that the films are homogeneous in terms of atomic composition and layer thickness over an area of about 125 × 125 mm. Furthermore, it was demonstrated that inverted plasma fireballs are a viable tool for obtaining homogeneous, large area carbon films with rapid growth and very little energy consumption. The obtained films show very low roughness.

KW - Carbon

KW - Deposition

KW - Inverted fireballs

KW - PECVD

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U2 - 10.1007/s42823-022-00424-9

DO - 10.1007/s42823-022-00424-9

M3 - Article

AN - SCOPUS:85140132495

SN - 1976-4251

JO - Carbon Letters

JF - Carbon Letters

ER -

Inverted fireball deposition of carbon films with extremely low surface roughness

Abstract

Keywords

ASJC Scopus subject areas

Fields of Expertise

UN SDGs

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