In situ heating studies of diffusion barrier layers for semiconductor devices

Research output: Contribution to conferencePosterResearch

Original languageEnglish
Publication statusPublished - 2017
EventMicroscopy Conference 2017 - Lausanne, Switzerland
Duration: 21 Aug 201725 Aug 2017
http://www.mc2017.ch/

Conference

ConferenceMicroscopy Conference 2017
Abbreviated titleMC 2017
CountrySwitzerland
CityLausanne
Period21/08/1725/08/17
Internet address

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Knez, D., Dienstleder, M., Grogger, W., Hofer, F., & Fisslthaler, E. (2017). In situ heating studies of diffusion barrier layers for semiconductor devices. Poster session presented at Microscopy Conference 2017, Lausanne, Switzerland.

In situ heating studies of diffusion barrier layers for semiconductor devices. / Knez, Daniel; Dienstleder, Martina; Grogger, Werner; Hofer, Ferdinand; Fisslthaler, Evelin.

2017. Poster session presented at Microscopy Conference 2017, Lausanne, Switzerland.

Research output: Contribution to conferencePosterResearch

Knez, D, Dienstleder, M, Grogger, W, Hofer, F & Fisslthaler, E 2017, 'In situ heating studies of diffusion barrier layers for semiconductor devices' Microscopy Conference 2017, Lausanne, Switzerland, 21/08/17 - 25/08/17, .
Knez D, Dienstleder M, Grogger W, Hofer F, Fisslthaler E. In situ heating studies of diffusion barrier layers for semiconductor devices. 2017. Poster session presented at Microscopy Conference 2017, Lausanne, Switzerland.
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title = "In situ heating studies of diffusion barrier layers for semiconductor devices",
author = "Daniel Knez and Martina Dienstleder and Werner Grogger and Ferdinand Hofer and Evelin Fisslthaler",
year = "2017",
language = "English",
note = "Microscopy Conference 2017, MC 2017 ; Conference date: 21-08-2017 Through 25-08-2017",
url = "http://www.mc2017.ch/",

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TY - CONF

T1 - In situ heating studies of diffusion barrier layers for semiconductor devices

AU - Knez, Daniel

AU - Dienstleder, Martina

AU - Grogger, Werner

AU - Hofer, Ferdinand

AU - Fisslthaler, Evelin

PY - 2017

Y1 - 2017

M3 - Poster

ER -