Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Peter Scheibelhofer, Ernst Stadlober, Günter Hayderer, Günther Leditzky

Research output: Chapter in Book/Report/Conference proceedingConference contributionResearchpeer-review

Original languageEnglish
Title of host publicationXX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties
Place of PublicationKyiv
PublisherFaculty of Cybernetics, Taras Shevchenko National University of Kyiv
Pages161-169
ISBN (Print)978-80-7231-897-1
Publication statusPublished - 2012
EventPDMU-2012: XX International Conference - Brno, Czech Republic
Duration: 17 Sep 201221 Sep 2012

Conference

ConferencePDMU-2012: XX International Conference
CountryCzech Republic
CityBrno
Period17/09/1221/09/12

Fields of Expertise

  • Information, Communication & Computing

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Scheibelhofer, P., Stadlober, E., Hayderer, G., & Leditzky, G. (2012). Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. In XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties (pp. 161-169). Kyiv: Faculty of Cybernetics, Taras Shevchenko National University of Kyiv.