Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication

Peter Scheibelhofer, Ernst Stadlober, Günter Hayderer, Günther Leditzky

Research output: Chapter in Book/Report/Conference proceedingConference contribution

LanguageEnglish
Title of host publicationXX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties
Place of PublicationKyiv
PublisherFaculty of Cybernetics, Taras Shevchenko National University of Kyiv
Pages161-169
ISBN (Print)978-80-7231-897-1
StatusPublished - 2012
EventPDMU-2012: XX International Conference - Brno, Czech Republic
Duration: 17 Sep 201221 Sep 2012

Conference

ConferencePDMU-2012: XX International Conference
CountryCzech Republic
CityBrno
Period17/09/1221/09/12

Fields of Expertise

  • Information, Communication & Computing

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Scheibelhofer, P., Stadlober, E., Hayderer, G., & Leditzky, G. (2012). Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. In XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties (pp. 161-169). Kyiv: Faculty of Cybernetics, Taras Shevchenko National University of Kyiv.

Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. / Scheibelhofer, Peter; Stadlober, Ernst; Hayderer, Günter; Leditzky, Günther.

XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties. Kyiv : Faculty of Cybernetics, Taras Shevchenko National University of Kyiv, 2012. p. 161-169.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Scheibelhofer, P, Stadlober, E, Hayderer, G & Leditzky, G 2012, Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. in XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties. Faculty of Cybernetics, Taras Shevchenko National University of Kyiv, Kyiv, pp. 161-169, PDMU-2012: XX International Conference, Brno, Czech Republic, 17/09/12.
Scheibelhofer P, Stadlober E, Hayderer G, Leditzky G. Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. In XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties. Kyiv: Faculty of Cybernetics, Taras Shevchenko National University of Kyiv. 2012. p. 161-169.
Scheibelhofer, Peter ; Stadlober, Ernst ; Hayderer, Günter ; Leditzky, Günther. / Improvements on prediction accuracy and reliability of a maintenance model for semiconductor fabrication. XX. International Conference PDMU-2012: Problems of Decision Making under Uncertainties. Kyiv : Faculty of Cybernetics, Taras Shevchenko National University of Kyiv, 2012. pp. 161-169
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