Improvement of Metallic Thin Films for HR-SEM by Using DC Magnetron Sputter Coater

Johannes Rattenberger, Alexander Melischnig, Ilse Letofsky-Papst, Thomas Ganner, Hartmuth Schröttner

Research output: Non-print formWebsite / Web publicationResearch

Abstract

Preparation techniques, like several kinds of coating methods play an important role for high resolution scanning electron microscopy (HR-SEM). Nonconductive sample like biological and synthetic samples have to be prepared with a thin conductive layer to prevent charging.
Original languageEnglish
PublisherLeica Microsystems
Publication statusPublished - 9 Mar 2016

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Improvement of Metallic Thin Films for HR-SEM by Using DC Magnetron Sputter Coater. Rattenberger, Johannes (Author); Melischnig, Alexander (Author); Letofsky-Papst, Ilse (Author); Ganner, Thomas (Author); Schröttner, Hartmuth (Author). 2016. Leica Microsystems.

Research output: Non-print formWebsite / Web publicationResearch

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AU - Rattenberger, Johannes

AU - Melischnig, Alexander

AU - Letofsky-Papst, Ilse

AU - Ganner, Thomas

AU - Schröttner, Hartmuth

N1 - Leica Science Lab

PY - 2016/3/9

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N2 - Preparation techniques, like several kinds of coating methods play an important role for high resolution scanning electron microscopy (HR-SEM). Nonconductive sample like biological and synthetic samples have to be prepared with a thin conductive layer to prevent charging.

AB - Preparation techniques, like several kinds of coating methods play an important role for high resolution scanning electron microscopy (HR-SEM). Nonconductive sample like biological and synthetic samples have to be prepared with a thin conductive layer to prevent charging.

M3 - Website / Web publication

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