Impact of the NO Anneal on the Microscopic Structure and Chemical Composition of the Si‐Face 4H‐SiC/SiO2 Interface

Gernot Gruber, Christian Gspan, Evelin Fisslthaler, Martina Dienstleder, Gregor Pobegen, Thomas Aichinger, Robert Meszaros, Werner Grogger, Peter Hadley

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1800022
Number of pages7
JournalAdvanced energy materials
Volume5
DOIs
Publication statusPublished - 2018

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Impact of the NO Anneal on the Microscopic Structure and Chemical Composition of the Si‐Face 4H‐SiC/SiO2 Interface. / Gruber, Gernot; Gspan, Christian; Fisslthaler, Evelin; Dienstleder, Martina; Pobegen, Gregor; Aichinger, Thomas; Meszaros, Robert ; Grogger, Werner; Hadley, Peter.

In: Advanced energy materials, Vol. 5, 2018, p. 1800022.

Research output: Contribution to journalArticleResearchpeer-review

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AU - Gruber, Gernot

AU - Gspan, Christian

AU - Fisslthaler, Evelin

AU - Dienstleder, Martina

AU - Pobegen, Gregor

AU - Aichinger, Thomas

AU - Meszaros, Robert

AU - Grogger, Werner

AU - Hadley, Peter

PY - 2018

Y1 - 2018

U2 - 10.1002/admi.201800022

DO - 10.1002/admi.201800022

M3 - Article

VL - 5

SP - 1800022

JO - Advanced energy materials

JF - Advanced energy materials

SN - 1614-6832

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