Impact of the NO Anneal on the Microscopic Structure and Chemical Composition of the Si‐Face 4H‐SiC/SiO2 Interface

Gernot Gruber, Christian Gspan, Evelin Fisslthaler, Martina Dienstleder, Gregor Pobegen, Thomas Aichinger, Robert Meszaros, Werner Grogger, Peter Hadley

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1800022
Number of pages7
JournalAdvanced energy materials
Volume5
DOIs
Publication statusPublished - 2018

ASJC Scopus subject areas

  • Materials Science(all)

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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