Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

Stefan Kirnstötter, Martin Mario Faccinelli, Johannes Laven, Werner Schustereder, Hans-Joachim Schulze, Reinhart Job, Peter Hadley

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)483-489
JournalECS Transactions
Volume49
DOIs
Publication statusPublished - 2012

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Kirnstötter, S., Faccinelli, M. M., Laven, J., Schustereder, W., Schulze, H-J., Job, R., & Hadley, P. (2012). Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current. ECS Transactions, 49, 483-489. https://doi.org/10.1149/04901.0475ecst

Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current. / Kirnstötter, Stefan; Faccinelli, Martin Mario; Laven, Johannes; Schustereder, Werner; Schulze, Hans-Joachim; Job, Reinhart; Hadley, Peter.

In: ECS Transactions, Vol. 49, 2012, p. 483-489.

Research output: Contribution to journalArticleResearch

Kirnstötter, S, Faccinelli, MM, Laven, J, Schustereder, W, Schulze, H-J, Job, R & Hadley, P 2012, 'Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current' ECS Transactions, vol. 49, pp. 483-489. https://doi.org/10.1149/04901.0475ecst
Kirnstötter S, Faccinelli MM, Laven J, Schustereder W, Schulze H-J, Job R et al. Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current. ECS Transactions. 2012;49:483-489. https://doi.org/10.1149/04901.0475ecst
Kirnstötter, Stefan ; Faccinelli, Martin Mario ; Laven, Johannes ; Schustereder, Werner ; Schulze, Hans-Joachim ; Job, Reinhart ; Hadley, Peter. / Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current. In: ECS Transactions. 2012 ; Vol. 49. pp. 483-489.
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