Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

Stefan Kirnstötter, Martin Mario Faccinelli, Johannes Laven, Werner Schustereder, Hans-Joachim Schulze, Reinhart Job, Peter Hadley

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)483-489
JournalECS Transactions
Volume49
DOIs
Publication statusPublished - 2012

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

Kirnstötter, S., Faccinelli, M. M., Laven, J., Schustereder, W., Schulze, H-J., Job, R., & Hadley, P. (2012). Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current. ECS Transactions, 49, 483-489. https://doi.org/10.1149/04901.0475ecst