Imaging of ultrathin silicon dioxide layers on silicon with energy filtering transmission electron microscopy

Bernhard Schaffer

Research output: ThesisDiploma ThesisResearch

Original languageEnglish
Publication statusPublished - 2002

Treatment code (Nähere Zuordnung)

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Imaging of ultrathin silicon dioxide layers on silicon with energy filtering transmission electron microscopy. / Schaffer, Bernhard.

2002.

Research output: ThesisDiploma ThesisResearch

@phdthesis{a7b1677494e14e9faa6d79d8aecb2050,
title = "Imaging of ultrathin silicon dioxide layers on silicon with energy filtering transmission electron microscopy",
author = "Bernhard Schaffer",
year = "2002",
language = "English",

}

TY - THES

T1 - Imaging of ultrathin silicon dioxide layers on silicon with energy filtering transmission electron microscopy

AU - Schaffer, Bernhard

PY - 2002

Y1 - 2002

M3 - Diploma Thesis

ER -