Imaging of ultrathin silicon dioxide layers in semiconducting devices by means of energy-filtered transmission electron microscopy

Bernhard Schaffer, Werner Grogger, Ferdinand Hofer

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)405-408
JournalInstitute of Physics Conference Series
Volume180
Publication statusPublished - 2004

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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