Abstract
Metal oxide nanostructures like tungsten oxide nanowires are intensively studied materials for sensor applications. In this work we report on tungsten oxide gas sensors integrated on a CMOS fabricated microhotplate chip. Tungsten oxide gas sensors were prepared by drop coating of a nanowire network suspension onto interdigitated electrodes prefabricated on the CMOS microhotplate chip. The tungsten oxide nanowire network was characterised by TEM and Raman spectroscopy, confirming their non-stoichiometric state. Using tungsten oxide nanowire networks as gas sensing material we observed high sensitivity to hydrogen sulphide: concentrations of 1 ppm have been detected with a sensor response up to 55%.
Original language | English |
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Pages (from-to) | 7132-7136 |
Journal | Materials Today: Proceedings |
Volume | 4 |
Issue number | 7,2 |
DOIs | |
Publication status | Published - 2017 |
ASJC Scopus subject areas
- Materials Science(all)
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Application