High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition

Robert Winkler; Georg Arnold; Roland Schmied; Angelina Orthacker; Jason D. Fowlkes; R. Timilsina; Aleksandra Szkudlarek; Ivo Utke; Philip D. Rack; Gerald Kothleitner; Harald Plank

High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition

Robert Winkler, Georg Arnold, Roland Schmied, Angelina Orthacker, Jason D. Fowlkes, R. Timilsina, Aleksandra Szkudlarek, Ivo Utke, Philip D. Rack, Gerald Kothleitner, Harald Plank

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2015
Event	EIPBN 2015 - San Diego Duration: 25 May 2015 → 31 May 2015

Conference

Conference	EIPBN 2015
City	San Diego
Period	25/05/15 → 31/05/15

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Cite this

@conference{7e797eda682047c2be889c0337620a61,

title = "High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition",

author = "Robert Winkler and Georg Arnold and Roland Schmied and Angelina Orthacker and Fowlkes, {Jason D.} and R. Timilsina and Aleksandra Szkudlarek and Ivo Utke and Rack, {Philip D.} and Gerald Kothleitner and Harald Plank",

year = "2015",

language = "English",

note = "EIPBN 2015 ; Conference date: 25-05-2015 Through 31-05-2015",

}

TY - CONF

T1 - High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition

AU - Winkler, Robert

AU - Arnold, Georg

AU - Schmied, Roland

AU - Orthacker, Angelina

AU - Fowlkes, Jason D.

AU - Timilsina, R.

AU - Szkudlarek, Aleksandra

AU - Utke, Ivo

AU - Rack, Philip D.

AU - Kothleitner, Gerald

AU - Plank, Harald

PY - 2015

Y1 - 2015

M3 - Poster

T2 - EIPBN 2015

Y2 - 25 May 2015 through 31 May 2015

ER -