High dose proton implantations into silicon: a combined EBIC, SRP and TEM study

Stefan Kirnstötter, Martin Faccinelli, Christian Gspan, Werner Grogger, Moriz Jelinek, Werner Schustereder, Johannes G. Laven, Hans-Joachim Schulze, Peter Hadley

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1610-1642
JournalPhysica status solidi / C
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

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