High dose proton implantations into silicon: a combined EBIC, SRP and TEM study

Stefan Kirnstötter, Martin Faccinelli, Christian Gspan, Werner Grogger, Moriz Jelinek, Werner Schustereder, Johannes G. Laven, Hans-Joachim Schulze, Peter Hadley

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1610-1642
JournalPhysica status solidi / C
Volume1
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Application
  • Experimental

Cite this

High dose proton implantations into silicon: a combined EBIC, SRP and TEM study. / Kirnstötter, Stefan; Faccinelli, Martin; Gspan, Christian; Grogger, Werner; Jelinek, Moriz; Schustereder, Werner; Laven, Johannes G.; Schulze, Hans-Joachim; Hadley, Peter.

In: Physica status solidi / C, Vol. 1, 2014, p. 1610-1642.

Research output: Contribution to journalArticleResearchpeer-review

Kirnstötter, S, Faccinelli, M, Gspan, C, Grogger, W, Jelinek, M, Schustereder, W, Laven, JG, Schulze, H-J & Hadley, P 2014, 'High dose proton implantations into silicon: a combined EBIC, SRP and TEM study' Physica status solidi / C, vol. 1, pp. 1610-1642. https://doi.org/DOI: 10.1002/pssc.201400051
Kirnstötter, Stefan ; Faccinelli, Martin ; Gspan, Christian ; Grogger, Werner ; Jelinek, Moriz ; Schustereder, Werner ; Laven, Johannes G. ; Schulze, Hans-Joachim ; Hadley, Peter. / High dose proton implantations into silicon: a combined EBIC, SRP and TEM study. In: Physica status solidi / C. 2014 ; Vol. 1. pp. 1610-1642.
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AU - Schustereder, Werner

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