Hafnia sol-gel films synthesized from HfCl4: Changes of structure and properties with the firing temperature

Tongjit Kidchob, Luca Malfatti, Filomena Serra, Paolo Falcaro, Stefano Enzo, Plinio Innocenzi

Research output: Contribution to journalArticleResearchpeer-review

Abstract

Thin sol-gel hafnia films have been synthesised from HfCl4, the synthesis has revealed to be a simple route to fabrication of hafnia films with high transparency in the UV-visible range. The films have been fired at different temperatures in air up to 1000°C and have been characterized by X-ray diffraction and Fourier transform infrared spectroscopy. Infrared absorption spectra of hafnia films have allowed to follow the formation of monoclinic crystalline phases together with XRD. Formation of monoclinic hafnia crystallites has been observed upon calcination at temperatures higher than 600°C, as shown by infrared spectroscopy and XRD. The optical transmission and the refractive index as a function of the temperature of firing have been characterized by UV-Visible spectroscopy and spectroscopic ellipsometry. The hafnia films, after firing at 600°C, had a refractive index of 1.92 with a thickness of around 70 nm.

Original languageEnglish
Pages (from-to)89-93
Number of pages5
JournalJournal of sol gel science and technology
Volume42
Issue number1
DOIs
Publication statusPublished - Apr 2007
Externally publishedYes

Fingerprint

Sol-gels
gels
Refractive index
Temperature
infrared spectroscopy
temperature
refractivity
Spectroscopic ellipsometry
Infrared absorption
Light transmission
Crystallites
Calcination
roasting
Transparency
crystallites
infrared absorption
ellipsometry
Fourier transform infrared spectroscopy
Absorption spectra
Infrared spectroscopy

Keywords

  • Films
  • Hafnia
  • Infrared spectroscopy
  • XRD

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Hafnia sol-gel films synthesized from HfCl4 : Changes of structure and properties with the firing temperature. / Kidchob, Tongjit; Malfatti, Luca; Serra, Filomena; Falcaro, Paolo; Enzo, Stefano; Innocenzi, Plinio.

In: Journal of sol gel science and technology, Vol. 42, No. 1, 04.2007, p. 89-93.

Research output: Contribution to journalArticleResearchpeer-review

Kidchob, Tongjit ; Malfatti, Luca ; Serra, Filomena ; Falcaro, Paolo ; Enzo, Stefano ; Innocenzi, Plinio. / Hafnia sol-gel films synthesized from HfCl4 : Changes of structure and properties with the firing temperature. In: Journal of sol gel science and technology. 2007 ; Vol. 42, No. 1. pp. 89-93.
@article{4a36976153234f8aa9b4b9b0203e1ff2,
title = "Hafnia sol-gel films synthesized from HfCl4: Changes of structure and properties with the firing temperature",
abstract = "Thin sol-gel hafnia films have been synthesised from HfCl4, the synthesis has revealed to be a simple route to fabrication of hafnia films with high transparency in the UV-visible range. The films have been fired at different temperatures in air up to 1000°C and have been characterized by X-ray diffraction and Fourier transform infrared spectroscopy. Infrared absorption spectra of hafnia films have allowed to follow the formation of monoclinic crystalline phases together with XRD. Formation of monoclinic hafnia crystallites has been observed upon calcination at temperatures higher than 600°C, as shown by infrared spectroscopy and XRD. The optical transmission and the refractive index as a function of the temperature of firing have been characterized by UV-Visible spectroscopy and spectroscopic ellipsometry. The hafnia films, after firing at 600°C, had a refractive index of 1.92 with a thickness of around 70 nm.",
keywords = "Films, Hafnia, Infrared spectroscopy, XRD",
author = "Tongjit Kidchob and Luca Malfatti and Filomena Serra and Paolo Falcaro and Stefano Enzo and Plinio Innocenzi",
year = "2007",
month = "4",
doi = "10.1007/s10971-006-1511-9",
language = "English",
volume = "42",
pages = "89--93",
journal = "Journal of sol gel science and technology",
issn = "0928-0707",
publisher = "Springer Netherlands",
number = "1",

}

TY - JOUR

T1 - Hafnia sol-gel films synthesized from HfCl4

T2 - Changes of structure and properties with the firing temperature

AU - Kidchob, Tongjit

AU - Malfatti, Luca

AU - Serra, Filomena

AU - Falcaro, Paolo

AU - Enzo, Stefano

AU - Innocenzi, Plinio

PY - 2007/4

Y1 - 2007/4

N2 - Thin sol-gel hafnia films have been synthesised from HfCl4, the synthesis has revealed to be a simple route to fabrication of hafnia films with high transparency in the UV-visible range. The films have been fired at different temperatures in air up to 1000°C and have been characterized by X-ray diffraction and Fourier transform infrared spectroscopy. Infrared absorption spectra of hafnia films have allowed to follow the formation of monoclinic crystalline phases together with XRD. Formation of monoclinic hafnia crystallites has been observed upon calcination at temperatures higher than 600°C, as shown by infrared spectroscopy and XRD. The optical transmission and the refractive index as a function of the temperature of firing have been characterized by UV-Visible spectroscopy and spectroscopic ellipsometry. The hafnia films, after firing at 600°C, had a refractive index of 1.92 with a thickness of around 70 nm.

AB - Thin sol-gel hafnia films have been synthesised from HfCl4, the synthesis has revealed to be a simple route to fabrication of hafnia films with high transparency in the UV-visible range. The films have been fired at different temperatures in air up to 1000°C and have been characterized by X-ray diffraction and Fourier transform infrared spectroscopy. Infrared absorption spectra of hafnia films have allowed to follow the formation of monoclinic crystalline phases together with XRD. Formation of monoclinic hafnia crystallites has been observed upon calcination at temperatures higher than 600°C, as shown by infrared spectroscopy and XRD. The optical transmission and the refractive index as a function of the temperature of firing have been characterized by UV-Visible spectroscopy and spectroscopic ellipsometry. The hafnia films, after firing at 600°C, had a refractive index of 1.92 with a thickness of around 70 nm.

KW - Films

KW - Hafnia

KW - Infrared spectroscopy

KW - XRD

UR - http://www.scopus.com/inward/record.url?scp=33847236990&partnerID=8YFLogxK

U2 - 10.1007/s10971-006-1511-9

DO - 10.1007/s10971-006-1511-9

M3 - Article

VL - 42

SP - 89

EP - 93

JO - Journal of sol gel science and technology

JF - Journal of sol gel science and technology

SN - 0928-0707

IS - 1

ER -