Growth, structure and stability of sputter-deposited MoS2 thin films

Reinhard Kaindl, Bernhard C. Bayer, Roland Resel, Thomas Müller, Viera Skakalova, Gerlinde Habler, Rainer Abart, Alexey S. Cherevan, Dominik Eder, Maxime Blatter, Fabian Fischer, Jannik C. Meyer, Dmitry K. Polyushkin, Wolfgang Waldhauser

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)1115-1126
JournalBeilstein Journal of Nanotechnology
Volume8
DOIs
Publication statusPublished - 2017

Cite this

Kaindl, R., Bayer, B. C., Resel, R., Müller, T., Skakalova, V., Habler, G., ... Waldhauser, W. (2017). Growth, structure and stability of sputter-deposited MoS2 thin films. Beilstein Journal of Nanotechnology , 8, 1115-1126. https://doi.org/10.3762/bjnano.8.113