Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications

Anna Maria Coclite, Karen K. Gleason*

*Corresponding author for this work

Research output: Contribution to journalArticle

Fingerprint

Dive into the research topics of 'Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications'. Together they form a unique fingerprint.

Physics & Astronomy