Fundamental resolution limits during focused electron beam induced deposition on bulk substrates

Georg Arnold, Roland Schmied, R. Timilsina, J.D. Fowlkes, Angelina Orthacker, Gerald Kothleitner, P.D. Rack, Harald Plank

Research output: Contribution to conference(Old data) Lecture or Presentation

Original languageEnglish
Publication statusPublished - 22 Jul 2014
EventFEBIP 2014 - Frankfurt, Germany
Duration: 22 Jul 2014 → …

Conference

ConferenceFEBIP 2014
CountryGermany
CityFrankfurt
Period22/07/14 → …

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)
  • Experimental

Cite this

Arnold, G., Schmied, R., Timilsina, R., Fowlkes, J. D., Orthacker, A., Kothleitner, G., ... Plank, H. (2014). Fundamental resolution limits during focused electron beam induced deposition on bulk substrates. FEBIP 2014, Frankfurt, Germany.