Fundamental resolution limits during focused electron beam induced deposition on bulk substrates

Georg Arnold; Roland Schmied; R. Timilsina; J.D. Fowlkes; Angelina Orthacker; Gerald Kothleitner; P.D. Rack; Harald Plank

Fundamental resolution limits during focused electron beam induced deposition on bulk substrates

Georg Arnold, Roland Schmied, R. Timilsina, J.D. Fowlkes, Angelina Orthacker, Gerald Kothleitner, P.D. Rack, Harald Plank

Institute of Electron Microscopy and Nanoanalysis (5190)

Research output: Contribution to conference › (Old data) Lecture or Presentation

Original language	English
Publication status	Published - 22 Jul 2014
Event	FEBIP 2014 - Frankfurt, Germany Duration: 22 Jul 2014 → …

Conference

Conference	FEBIP 2014
Country/Territory	Germany
City	Frankfurt
Period	22/07/14 → …

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)
Experimental

Cite this

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title = "Fundamental resolution limits during focused electron beam induced deposition on bulk substrates",

author = "Georg Arnold and Roland Schmied and R. Timilsina and J.D. Fowlkes and Angelina Orthacker and Gerald Kothleitner and P.D. Rack and Harald Plank",

year = "2014",

month = jul,

day = "22",

language = "English",

note = "FEBIP 2014 ; Conference date: 22-07-2014",

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TY - CONF

T1 - Fundamental resolution limits during focused electron beam induced deposition on bulk substrates

AU - Arnold, Georg

AU - Schmied, Roland

AU - Timilsina, R.

AU - Fowlkes, J.D.

AU - Orthacker, Angelina

AU - Kothleitner, Gerald

AU - Rack, P.D.

AU - Plank, Harald

PY - 2014/7/22

Y1 - 2014/7/22

M3 - (Old data) Lecture or Presentation

T2 - FEBIP 2014

Y2 - 22 July 2014

ER -