Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

Georg Arnold, Rajendra Timislina, Jason Fowlkes, Angelina Orthacker, Gerald Kothleitner, Philip D. Rack, Harald Plank

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)7380-7387
JournalACS Applied Materials & Interfaces
Issue number6
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Cite this

Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis. / Arnold, Georg; Timislina, Rajendra; Fowlkes, Jason; Orthacker, Angelina; Kothleitner, Gerald; Rack, Philip D.; Plank, Harald.

In: ACS Applied Materials & Interfaces, No. 6, 2014, p. 7380-7387.

Research output: Contribution to journalArticleResearchpeer-review

@article{a7f03c3ba0ca4910ae43511305b0b347,
title = "Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis",
author = "Georg Arnold and Rajendra Timislina and Jason Fowlkes and Angelina Orthacker and Gerald Kothleitner and Rack, {Philip D.} and Harald Plank",
year = "2014",
doi = "10.1021/am5008003",
language = "English",
pages = "7380--7387",
journal = "ACS Applied Materials & Interfaces",
issn = "1944-8244",
publisher = "American Chemical Society",
number = "6",

}

TY - JOUR

T1 - Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

AU - Arnold, Georg

AU - Timislina, Rajendra

AU - Fowlkes, Jason

AU - Orthacker, Angelina

AU - Kothleitner, Gerald

AU - Rack, Philip D.

AU - Plank, Harald

PY - 2014

Y1 - 2014

U2 - 10.1021/am5008003

DO - 10.1021/am5008003

M3 - Article

SP - 7380

EP - 7387

JO - ACS Applied Materials & Interfaces

JF - ACS Applied Materials & Interfaces

SN - 1944-8244

IS - 6

ER -