Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

Georg Arnold, Rajendra Timislina, Jason Fowlkes, Angelina Orthacker, Gerald Kothleitner, Philip D. Rack, Harald Plank

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)7380-7387
JournalACS Applied Materials & Interfaces
Issue number6
DOIs
Publication statusPublished - 2014

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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